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A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer

Crossref DOI link: https://doi.org/10.1007/s00542-016-2892-5

Published Online: 2016-03-04

Published Print: 2017-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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