Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure
Crossref DOI link: https://doi.org/10.1007/s00542-016-2981-5
Published Online: 2016-06-29
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dong, Jian
Long, Zhi-jian
Jiang, Heng
Sun, Li
License valid from 2016-06-29