Fringing capacitance and tolerance of DRIE effect on the performance of bulk silicon comb-drive actuator
Crossref DOI link: https://doi.org/10.1007/s00542-016-3014-0
Published Online: 2016-06-16
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cai, Chunhua
Qin, Ming
Funding for this research was provided by:
Fundamental Research Funds for the Central Universities (2014B02014)
National High Technology Research and Development Program of China (2013AA041106)
License valid from 2016-06-16