Capacitive MEMS absolute pressure sensor using a modified commercial microfabrication process
Crossref DOI link: https://doi.org/10.1007/s00542-016-3015-z
Published Online: 2016-06-20
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Merdassi, Adel
Allan, Charles
Harvey, Edward J.
Chodavarapu, Vamsy P.
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada
University of Dayton
License valid from 2016-06-20