Comparative evaluation of detachable mold fixing methods aimed at low energy loss for ultrasonic nanoimprint lithography
Crossref DOI link: https://doi.org/10.1007/s00542-016-3028-7
Published Online: 2016-06-23
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mekaru, Harutaka
Yano, Takayuki
License valid from 2016-06-23