Crossmark

Stress reduction method in fabrication of a multi-scale inertial switch with ultra-high aspect ratio

Crossref DOI link: https://doi.org/10.1007/s00542-016-3037-6

Published Online: 2016-06-28

Published Print: 2017-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Du, Liqun

Chen, Shengli

Tao, Yousheng

Luo, Lei

Zhao, Ming

Yang, Tong

Liu, Shuangjie

Hao, Yongping
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51375077)

National High Technology Research and Development Program of China (2015AA042701)
License Information

License valid from 2016-06-28