Crossmark

Plastic deformation of membrane with mesa silicon microstructure

Crossref DOI link: https://doi.org/10.1007/s00542-016-3059-0

Published Online: 2016-07-06

Published Print: 2017-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Jiang, Wanli

Xu, Dehui

Xiong, Bin

Wang, Yuelin
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (CN) (51306200)

National Natural Science Foundation of China (51577186)
License Information

License valid from 2016-07-06