Thermal behavior modeling and characteristics analysis of electrothermal microactuators
Crossref DOI link: https://doi.org/10.1007/s00542-016-3070-5
Published Online: 2016-07-12
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shan, Tiqiang http://orcid.org/0000-0002-8823-6784
Qi, Xinglin
Cui, Liang
Zhou, Xiaodong
License valid from 2016-07-12