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An improved analytical and finite element method model of nanoelectromechanical system based micromachined ultrasonic transducers

Crossref DOI link: https://doi.org/10.1007/s00542-016-3073-2

Published Online: 2016-07-29

Published Print: 2017-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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