Micro pressure sensor with three degrees of freedom resonator
Crossref DOI link: https://doi.org/10.1007/s00542-016-3108-8
Published Online: 2016-08-18
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sujan, Y.
Uma, G.
Umapathy, M.
License valid from 2016-08-18
