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Electrostatic tuning in linear regime for 25.9-MHz micromechanical resonator with 120-nm capacitive gap

Crossref DOI link: https://doi.org/10.1007/s00542-016-3136-4

Published Online: 2016-09-25

Published Print: 2017-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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