Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor
Crossref DOI link: https://doi.org/10.1007/s00542-016-3168-9
Published Online: 2016-10-21
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shikida, Mitsuhiro http://orcid.org/0000-0001-7649-4420
Kim, Pilyoung
Shibata, Shunji
Funding for this research was provided by:
Japan Society for the Promotion of Science (26286034)
Text and Data Mining valid from 2016-10-21
Version of Record valid from 2016-10-21
Article History
Received: 24 July 2016
Accepted: 8 October 2016
First Online: 21 October 2016