Design and optimization of a novel structural MEMS piezoresistive pressure sensor
Crossref DOI link: https://doi.org/10.1007/s00542-016-3187-6
Published Online: 2016-11-11
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Chuang https://orcid.org/0000-0003-0393-651X
Cordovilla, Francisco
Jagdheesh, R.
Ocaña, José L.
Funding for this research was provided by:
China Scholarship Council (201508320275)
License valid from 2016-11-11