Modeling and process design optimization of a piezoelectric micromachined ultrasonic transducers (PMUT) using lumped elements parameters
Crossref DOI link: https://doi.org/10.1007/s00542-016-3205-8
Published Online: 2016-11-22
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Amar, Achraf Ben
Cao, Hung
Kouki, Ammar B.
License valid from 2016-11-22
