Design and optimization of a doubly clamped piezoresistive acceleration sensor with an integrated silicon nanowire piezoresistor
Crossref DOI link: https://doi.org/10.1007/s00542-016-3219-2
Published Online: 2016-11-30
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Vetrivel, S.
Mathew, Ribu
Sankar, A. Ravi
License valid from 2016-11-30
