Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process
Crossref DOI link: https://doi.org/10.1007/s00542-016-3250-3
Published Online: 2017-01-31
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Merdassi, Adel
Kezzo, Mohamad Nizar
Chodavarapu, Vamsy P.
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada (CA)
University of Dayton
License valid from 2017-01-31