Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage
Crossref DOI link: https://doi.org/10.1007/s00542-016-3264-x
Published Online: 2017-01-11
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Samaali, Hatem
Najar, Fehmi http://orcid.org/0000-0003-3545-809X
License valid from 2017-01-11