Numerical study on the shrinkage behavior of SU-8 patterns
Crossref DOI link: https://doi.org/10.1007/s00542-017-3276-1
Published Online: 2017-01-12
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yin, Zhifu
Cheng, E.
Zou, Helin
Funding for this research was provided by:
Specialized Research Fund for the Doctoral Program of Higher Education of China (SRFDP)
License valid from 2017-01-12