Theoretical and finite element analysis of dynamic deformation in resonating micromirrors
Crossref DOI link: https://doi.org/10.1007/s00542-017-3335-7
Published Online: 2017-02-28
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Farrugia, Russell http://orcid.org/0000-0002-7477-2383
Grech, Ivan
Camilleri, Duncan
Casha, Owen
Gatt, Edward
Micallef, Joseph
License valid from 2017-02-28