Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive
Crossref DOI link: https://doi.org/10.1007/s00542-017-3360-6
Published Online: 2017-03-20
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Langa, S. https://orcid.org/0000-0001-7052-6639
Conrad, H.
Kaiser, B.
Stolz, M.
Gaudet, M.
Uhlig, S.
Schimmanz, K.
Schenk, H.
Funding for this research was provided by:
German Federal Ministry of Education and Research
License valid from 2017-03-20