Design optimization for an SOI MOEMS accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3370-4
Published Online: 2017-03-20
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Teo, Adrian J. T. http://orcid.org/0000-0003-3779-6535
Li, Holden King-Ho
Tan, Say Hwa
Yoon, Yong-Jin
Funding for this research was provided by:
Nanyang Technological University (SG)
Temasek Lab@NTU TDP
License valid from 2017-03-20