Magnetic field assisted bonding technology for released micro actuator and mirror surface
Crossref DOI link: https://doi.org/10.1007/s00542-017-3432-7
Published Online: 2017-05-12
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xue, Yuan
He, Siyuan
License valid from 2017-05-12