Design and modeling of a frog-shape MEMS capacitive microphone using SOI technology
Crossref DOI link: https://doi.org/10.1007/s00542-017-3461-2
Published Online: 2017-06-05
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sedaghat, Sedighe Babaei
Ganji, Bahram Azizolla
Ansari, Reza
License valid from 2017-06-05