Squeeze film air damping ratio analysis of a silicon capacitive micromechanical accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3464-z
Published Online: 2017-06-10
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mo, Yuming
Du, Lianming
Qu, BingBing
Peng, Bo
Yang, Jie
License valid from 2017-06-10