Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function
Crossref DOI link: https://doi.org/10.1007/s00542-017-3524-4
Published Online: 2017-08-10
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Guo, Zhanshe
Fu, Peng
Liu, Defeng
Huang, Manguo
Funding for this research was provided by:
the Aviation Research Foundation (20153451023)
License valid from 2017-08-10