Influence of water diffusion in deposited silicon oxides on direct bonding of hydrophilic surfaces
Crossref DOI link: https://doi.org/10.1007/s00542-017-3527-1
Published Online: 2017-08-17
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Desomberg, J.
Fournel, F.
Moriceau, H.
Roule, A.
Barthel, E.
Rieutord, F.
Funding for this research was provided by:
CEA Grenoble
License valid from 2017-08-17