Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation
Crossref DOI link: https://doi.org/10.1007/s00542-017-3554-y
Published Online: 2017-09-30
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Siahpour, Shahin
Zand, Mahdi Moghimi https://orcid.org/0000-0002-7868-1438
Mousavi, Mohammad
Funding for this research was provided by:
Iran National Science Foundation
License valid from 2017-09-30