Magnetic films for electromagnetic actuation in MEMS switches
Crossref DOI link: https://doi.org/10.1007/s00542-017-3595-2
Published Online: 2017-10-24
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
de Oliveira Hansen, Roana http://orcid.org/0000-0001-5694-2820
Mátéfi-Tempfli, Mária
Safonovs, Romans
Adam, Jost
Chemnitz, Steffen
Reimer, Tim
Wagner, Bernhard
Benecke, Wolfgang
Mátéfi-Tempfli, Stefan
License valid from 2017-10-24