Investigation of air damping effect in two kinds of capacitive MEMS accelerometers
Crossref DOI link: https://doi.org/10.1007/s00542-017-3598-z
Published Online: 2017-10-23
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mo, Yuming
Zhou, Hao
Xie, Guofen
Tang, Bin
Funding for this research was provided by:
Major subject on Reliability Improvement in China Academy of Engineering Physics (TA060606)
License valid from 2017-10-23