Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3599-y
Published Online: 2017-10-26
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shi, Huichao
Fan, Shangchun
Li, Wenlong
License valid from 2017-10-26