Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion
Crossref DOI link: https://doi.org/10.1007/s00542-017-3626-z
Published Online: 2017-11-20
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Hak-Jun
Woo, Siwoong
Park, Jaehyun
Jeong, Jae-Heon
Kim, Myeonghyeon
Ryu, Jiheun
Gweon, Dae-Gab
Choi, Young-Man http://orcid.org/0000-0002-9754-0307
Funding for this research was provided by:
MOTIE (10063010)
License valid from 2017-11-20