Electro-thermal analysis of an Al–Ti multilayer thin film microheater for MEMS thruster application
Crossref DOI link: https://doi.org/10.1007/s00542-017-3649-5
Published Online: 2017-12-29
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Xingchen
Huang, Yiyong
Chen, Xiaoqian
Xu, Xiangming
Xiao, Dingbang
Funding for this research was provided by:
National Natural Science Foundation of China (61690210)
License valid from 2017-12-29