Effect of geometrical parameters on radiometric force in low-pressure MEMS gas actuator
Crossref DOI link: https://doi.org/10.1007/s00542-017-3653-9
Published Online: 2018-01-06
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Barzegar Gerdroodbary, M.
Ganji, D. D.
Taeibi-Rahni, M.
Vakilipour, Shidvash
License valid from 2018-01-06