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Impact of sidewall spacer on n-InGaAs devices and hybrid InGaAs/Si CMOS amplifiers in deca-nanometer regime

Crossref DOI link: https://doi.org/10.1007/s00542-017-3658-4

Published Online: 2017-12-07

Published Print: 2020-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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