Wafer-level vacuum package of two-dimensional micro-scanner
Crossref DOI link: https://doi.org/10.1007/s00542-017-3668-2
Published Online: 2017-12-15
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chu, Hoang Manh http://orcid.org/0000-0001-5808-8736
Sasaki, Takashi
Hane, Kazuhiro
Funding for this research was provided by:
the Japanese Society for the Promotion of Science (K122-2134)
Text and Data Mining valid from 2017-12-15
Version of Record valid from 2017-12-15
Article History
Received: 14 June 2017
Accepted: 9 December 2017
First Online: 15 December 2017