PDMS–PMMA bonding improvement using SiO2 intermediate layer and its application in fabricating gas micro valves
Crossref DOI link: https://doi.org/10.1007/s00542-017-3676-2
Published Online: 2018-01-17
Published Print: 2018-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Norouzi, Ahmad R.
Nikfarjam, Alireza http://orcid.org/0000-0002-6839-9041
Hajghassem, Hassan
Text and Data Mining valid from 2018-01-17
Article History
Received: 4 October 2017
Accepted: 12 December 2017
First Online: 17 January 2018