Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity
Crossref DOI link: https://doi.org/10.1007/s00542-017-3679-z
Published Online: 2017-12-22
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hari, K.
Verma, Satish Kumar
Praveen Krishna, I. R.
Seena, V.
License valid from 2017-12-22