Influence of the side etching effect in DRIE on performance of electrostatic linear comb-drive actuators
Crossref DOI link: https://doi.org/10.1007/s00542-017-3685-1
Published Online: 2017-12-27
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pham, Phuc Hong
Dang, Lam Bao
Funding for this research was provided by:
Vietnam National Foundation for Science and Technology Development (NAFOSTED) (107.01-2015.18)
License valid from 2017-12-27