A novel method to fabricate silicon nanoprobe array with ultra-sharp tip on (111) silicon wafer
Crossref DOI link: https://doi.org/10.1007/s00542-017-3687-z
Published Online: 2017-12-29
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Xiao http://orcid.org/0000-0003-3170-6287
Yu, Xiao
Li, Tie
Wang, Yuelin
Funding for this research was provided by:
National Basic Research Program of China (2012CB933301, 2012CB934102)
Fund for Creative Research of NSFC (61321492)
National Natural Science Foundation of China (91323304, 81201358, 61327811, 81402468)
License valid from 2017-12-29