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A large thrust trans-scale precision positioning stage based on the inertial stick–slip driving

Crossref DOI link: https://doi.org/10.1007/s00542-018-04286-y

Published Online: 2019-01-08

Published Print: 2019-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhong, Bowen

Zhu, Jie https://orcid.org/0000-0002-8638-0328
Jin, Ziqi

He, Haidong

Wang, Zhenhua

Sun, Lining
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (No.51505314)

National Natural Science Foundation of China (No.51875378)

National Natural Science Foundation of China (61433010)

Suzhou Science and Technology Development Project (No. SYG201720)

Jiangsu Province Natural Science Foundation (No. BK20181439)
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Article History

Received: 31 October 2018

Accepted: 26 December 2018

First Online: 8 January 2019