Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators
Crossref DOI link: https://doi.org/10.1007/s00542-018-3709-5
Published Online: 2018-01-11
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Zhuo
Yu, Yueqing
Zhang, Xuping http://orcid.org/0000-0002-7498-495X
Funding for this research was provided by:
National Natural Science Foundation of China (51575006)
License valid from 2018-01-11