Design and simulation of RF MEMS comb drive with ultra-low pull-in voltage and maximum displacement
Crossref DOI link: https://doi.org/10.1007/s00542-018-3739-z
Published Online: 2018-01-24
Published Print: 2018-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nashat, Salah El Din
AbdelRassoul, Roshdy
Abd El Bary, Abd El Moneim
Text and Data Mining valid from 2018-01-24
Article History
Received: 2 December 2017
Accepted: 17 January 2018
First Online: 24 January 2018