Soft mold NanoImprint Lithography: a versatile tool for sub-wavelength grating applications
Crossref DOI link: https://doi.org/10.1007/s00542-018-3740-6
Published Online: 2018-02-07
Published Print: 2022-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pelloquin, S. https://orcid.org/0000-0001-5963-2852
Augé, S.
Sharshavina, K.
Doucet, J.-B.
Héliot, A.
Camon, H.
Monmayrant, A.
Gauthier-Lafaye, O.
Text and Data Mining valid from 2018-02-07
Version of Record valid from 2018-02-07
Article History
Received: 6 September 2017
Accepted: 18 January 2018
First Online: 7 February 2018