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Structure design and test of MEMS thermocouple infrared detector

Crossref DOI link: https://doi.org/10.1007/s00542-018-3809-2

Published Online: 2018-02-23

Published Print: 2018-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Lian-min, Cao

Ya-zhu, Zhang

Shi-jiao, Sun

Hui, Guo

Zhen, Zhang
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Text and Data Mining valid from 2018-02-23
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Article History

Received: 28 August 2017

Accepted: 5 February 2018

First Online: 23 February 2018

Compliance with ethical standards

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: The authors declare no conflict of interest.