Optimization of a MEMS variable capacitor with high linearity and large tuning ratio
Crossref DOI link: https://doi.org/10.1007/s00542-018-3844-z
Published Online: 2018-03-22
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gong, Zhuhao http://orcid.org/0000-0002-6166-0841
Liu, Huiliang
Guo, Xin
Liu, Zewen
Text and Data Mining valid from 2018-03-22
Article History
Received: 14 November 2017
Accepted: 8 March 2018
First Online: 22 March 2018