Crossmark

Relative humidity influence on adhesion effect in MEMS flexible structures

Published Online: 2018-03-19

Published Print: 2022-06

Authors

Birleanu, Corina

Pustan, Marius

Rusu, Florina

Dudescu, Cristian

Muller, Raluca

Baracu, Angela
Funding

Funding for this research was provided by:

Romanian National Authority for Scientific Research and Innovation, CNCS-UEFISCDI (PNCDI III - PED 33-2017)
License Information

Text and Data Mining valid from 2018-03-19

Version of Record valid from 2018-03-19
More Information

Article History

Received: 31 August 2017

Accepted: 11 March 2018

First Online: 19 March 2018

Document is current