A micro vertically-allocated SU-8 check valve and its characteristics
Crossref DOI link: https://doi.org/10.1007/s00542-018-3958-3
Published Online: 2018-05-19
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mao, Zebing
Yoshida, Kazuhiro
Kim, Joon-wan http://orcid.org/0000-0001-7273-5055
Text and Data Mining valid from 2018-05-19
Article History
Received: 2 May 2018
Accepted: 11 May 2018
First Online: 19 May 2018