Analysis of a fiber-optic deep-etched silicon Fabry–Perot temperature sensor and modeling its fabrication imperfections
Crossref DOI link: https://doi.org/10.1007/s00542-018-3978-z
Published Online: 2018-06-01
Published Print: 2019-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zarei, Sanaz
Shahabadi, Mahmoud
Mohajerzadeh, Shamsoddin
Text and Data Mining valid from 2018-06-01
Article History
Received: 10 January 2018
Accepted: 25 May 2018
First Online: 1 June 2018