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Lithography-induced hydrophobic surfaces of silicon wafers with excellent anisotropic wetting properties

Crossref DOI link: https://doi.org/10.1007/s00542-018-4010-3

Published Online: 2018-06-30

Published Print: 2019-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhu, Jiajing

Tian, Yanling

Liu, Xianping

Yang, Chengjuan
Funding

Funding for this research was provided by:

China-EU H2020 International Science and Technology Cooperation Project (2016YFE0112100)

China-EU H2020 International Science and Technology Cooperation Project (644971)

China Scholarship Council

National Natural Science Foundations of China (51405333)

National Natural Science Foundations of China (51675371)

National Natural Science Foundations of China (51675376)

National Natural Science Foundations of China (51675367)
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Article History

Received: 14 June 2018

Accepted: 17 June 2018

First Online: 30 June 2018