Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers
Crossref DOI link: https://doi.org/10.1007/s00542-018-4040-x
Published Online: 2018-07-21
Published Print: 2021-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maity, Reshmi
Maity, N. P.
Guha, K.
Baishya, S.
Text and Data Mining valid from 2018-07-21
Version of Record valid from 2018-07-21
Article History
Received: 12 March 2018
Accepted: 9 July 2018
First Online: 21 July 2018